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The first machines were developed in the late 90's is several laboratories, either as research projects, or in industrial environments, when efficient pulse-tube cryocoolers, like the Cryomech machine, became available.
A dilution refrigerator using the pulse tube and GM hybrid cryocooler for neutron scattering, Y. Koike, Y. Morii, T. Igarashi, M. Kubota, Y. Hiresaki, K. Tanida, Cryogenics 39 (1999) 579-583, https://doi.org/10.1016/S0011-2275(99)00077-6
A commercial pulse-tube dilution refrigerator was developed by H. Godfrin and Ch. Gianèse (CNRS) and the company l'Air Liquide in 1999. The first commercial machine was delivered to A. Giulini (Cuoricino experiment) in 2003. With 4 heat exchangers, it had a working temperature well below 8.5 mK. Because of industrial agreements, details were published later: