Selected Publications
 

Etching suspended superconducting hybrid junctions from a multilayer

H.Q. Nguyen, L.M.A. Pascal, Z.H. Peng, O. Buisson, B. Gilles, C.B. Winkelmann, H. Courtois

A method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor—insulator—normal metalmultilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated. We analyze semi-quantitatively the thermal behavior of a typical device.


Appl. Phys. Lett. 100, 252602 (2012)

doi: 10.1063/1.4729779